Detailed Programme


The Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) is a biannual event. The upcoming edition will be held from 11-14 September 2016 in the Casino of Knokke (Belgium). 

It is the purpose of the UCPSS symposium to increase the level of understanding on ultra-clean processing and surface preparation technology in all steps of the fabrication of  ICs, PV-modules and bioelectronics devices. The conference consists of invited presentations, as well as selected contributing presentations and posters.

Tutorial Programme

Invited Presentations



"In Memoriam Prof. T. Ohmi"