|
The previous UCPSS editions were held in Louvain
(1992), Bruges (1994), Antwerp (1996), Ostend (1998, 2000 and 2002), Brussels (2004) and Antwerp (2006). The presented papers have been published in
the proceedings:
UCPSS1994: Proceedings of the Second International
Symposium on Ultra-Clean Processing of Silicon Surfaces, (Acco,
Leuven, 1994, ISBN 90-334-3262-5)
UCPSS1996: Proceedings of the Third International
Symposium on Ultra-Clean Processing of Silicon Surfaces, (Acco,
Leuven, 1996)
UCPSS1998: Proceedings
of the Fourth International Symposium on Ultra-Clean Processing
of Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon,
Switzerland, 1999), special edition of Solid State Phenomena Vols.
65-66 (ISBN 3-908450-40-3)
UCPSS2000: Proceedings
of the Fifth International Symposium on Ultra-Clean Processing of
Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon,
Switzerland, 2002), special edition of Solid State Phenomena Vols.
76-77 (ISBN 3-908450-57-8)
UCPSS2002: Proceedings
of the Sixth International Symposium on Ultra-Clean Processing of
Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon,
Switzerland, 2003), special edition of Solid State Phenomena Vols.
92-92 (ISBN 3-908450-78-0)
UCPSS2004: Proceedings
of the Seventh International Symposium on Ultra-Clean Processing
of Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon,
Switzerland, 2005), special edition of Solid State Phenomena Vols.
103-104 (ISBN 3-908451-06-x)
UCPSS2006:Proceedings
of the Eighth International Symposium on Ultra-Clean Processing
of Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon,
Switzerland, 2008), special edition of Solid State Phenomena Vols.
134 (ISBN 3-908451-46-9 / 978-3-908451-46-4)
UCPSS 2006 - Antwerp
|
