Introduction

It is our pleasure to invite you to participate in the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), which will be organised at the LAMOT conference center, in Mechelen (Belgium) from 12th to 15th April 2021. It is the purpose of the UCPSS Symposium to increase the level of understanding on ultra-clean processing technology and contamination control in all steps of the IC-production, PV manufacturing and bioelectronics.
The symposium consists of invited presentations, as well as selected contributed presentations and posters.
This symposium is a world class forum in the area of wafer cleaning, clean processing and related metrology and presents an excellent opportunity to give exposure to your company.